Ko te hanga o te 6N (≥99.9999% purity) ultra-high-purity whanariki e hiahia ana ki te whakamaaramatanga maha-waahanga, te whakauru hohonu, me te filtration ultra-ma ki te whakakore i nga konganuku, nga poke pararopi, me nga matūriki. Kei raro nei he tukanga tauine-ahumahi e whakauru ana i te whakamarumaru korehau, te purei awhina ngaruiti, me nga hangarau whai muri i te maimoatanga.
I. Te Maamaa Rawa Rawa me te Tango Parakore
1. Te Kowhiringa Rawa me te Maamaatanga
- ;Nga whakaritenga : Ko te parakore o te whanariki tuatahi ≥99.9% (3N kōeke), te katoa o nga poke whakarewa ≤500 ppm, te ihirangi waro waro ≤0.1%.
- ;Whakarewa Ngaruiti-Awhina:
Ka tukatukahia te whanariki masivesivá i roto i te reactor ngaruiti (2.45 GHz auau, 10–15 kW mana) i te 140–150°C. Ko te hurihanga ngaruiti-a-wairua ka whakarite kia tere te rewa i te wa e whakahoroa ana nga para pararopi (hei tauira, te pūhui tara). Te wa rewa: 30–45 meneti; te hohonutanga o te whakaurunga ngaruiti: 10–15 cm - ;Te Horoi Wai Iona:
Ka konatunatua te whanariki rewa ki te wai whakaheke (te aukati ≥18 MΩ·cm) i te 1:0.3 ōwehenga papatipu i roto i te reactor whakakorikori (120°C, 2 te pehanga pae) mo te 1 haora hei tango i nga tote wairewa-wai (hei tauira, te haukinia sulfate, te konutai pūhaumāota). Ka whakahekehia te waahanga wai ka whakamahia ano mo nga huringa 2-3 tae noa ki te kawe ≤5 μS/cm.
2. Te Whakanui-Maama me te Tatari
- ;Whenua Diatomaceous/Waro Whakahohe:
Ko te whenua diatomaceous (0.5–1%) me te waro whakahohe (0.2-0.5%) ka taapirihia ki te whanariki whakarewa i raro i te whakamarumaru hauota (130°C, 2-haora te whakakorikori) ki te whakauru i nga matatini whakarewa me nga toenga waro. - ;Tino-Precision Filtration:
E rua-waahanga filtration te whakamahi i te titanium sintered tātari (0.1 μm rahi pore) i ≤0.5 MPa pēhanga pūnaha. Tatau matūriki i muri i te filtration: ≤10 matūriki/L (rahi>0.5 μm).
II. Tukatuka Maama-Maama-Maamaa
1. Te Maamaa Tuatahi (Te Tangohanga Whakakore Whakakore).
- ;Taputapu : Ko te tiihi whakamaarama kiripaka tino parakore me te 316L he kowiri tira whakahiato whakahiato (≥15 pereti ariā), korehau ≤1 kPa .
- ;Tawhā Mahi:
- ;Te Waahanga Whangai : 250–280°C (ko te whanariki te whewhe i te 444.6°C i raro i te pehanga ambient; te korehau ka whakaiti i te ira koropuke ki te 260–300°C).
- ;Tauwehenga Reflux: 5:1–8:1; te rerekee o te pāmahana o runga ≤±0.5°C.
- ;Hua : Pure whanariki condensed ≥99.99% (4N grade), tapeke poke whakarewa (Fe, Cu, Ni) ≤1 ppm.
2. Te Maamaa Molecular Tuarua (Te Tango Parakore Organic)
- ;Taputapu : Te arai-poto molecular distiller me te 10–20 mm te whakaetonga-te whakaeatanga, te pāmahana whakaetonga 300–320°C, te korehau ≤0.1 Pa.
- ;Wehenga poke:
Ko nga mea pararopi iti-kohua (hei tauira, te tioetera, te tiophene) ka rehu, ka whakatahia, ka noho tonu nga poke-kohua-nui (hei tauira, polyaromatics) i roto i nga toenga na te rereke o te ara korekore. - ;Hua : Pukariki parakore ≥99.999% (5N kōeke), waro waro ≤0.001%, reiti toenga <0.3%.
3. Te Whakapai i te Rohe Tuatoru (Ka eke ki te 6N te Ma).
- ;Taputapu : Whakapaipai rohe whakapae me te mana pāmahana rohe-maha (±0.1°C), te tere haere rohe 1–3 mm/h.
- ;Wehewehenga:
Te whakamahi i nga whakarea wehewehe (K=Csolid/CliquidK=Cmārō/Cwai), 20–30 te rohe ka whakawhiti i nga konganuku (As, Sb) ki te pito ingot. Ko te 10–15% whakamutunga o te ingot whanariki ka makahia.
III. I muri-Maimoatanga me te Hanga Ultra-Ma
1. Tangohanga Whakarewa Tino-Parakore
- ;Tangohanga Etera/Waro Tetrachloride:
Ka konatunatua te whanariki ki te ether chromatographic-grade (1:0.5 rōrahi ōwehenga) i raro i te awhina ultrasonic (40 kHz, 40°C) mo te 30 meneti ki te tango i nga mahanga polar. - ;Whakaora Whakarewa:
Ko te whakamaarama molecular sieve adsorption me te korehau whakamarumaru ka whakaiti i nga toenga whakarewa ki te ≤0.1 ppm.
2. Ultrafiltration me te Whakawhiti Katote
- ;PTFE Membrane Ultrafiltration:
Ka tātarihia te whanariki whakarewa i roto i te 0.02 μm PTFE kiriuhi i 160–180°C me ≤0.2 MPa pēhanga. - ;Resin Whakawhiti Katote:
Ko nga kapia chelating (hei tauira, Amberlite IRC-748) ka tango i nga katote whakarewa taumata-ppb (Cu²⁺, Fe³⁺) i te 1–2 BV/h reiti rere.
3. Te Hunga Taiao Ultra-Ma
- ;Te Whakangota Hau Inert:
I roto i te akomanga 10 rūma horoi, ka whakangotahia te whanariki whakarewa ki te hauota (0.8–1.2 MPa pehanga) ki roto i te 0.5-1 mm porowhita porowhita (makuku <0.001%). - ;Te Whakapaipai Maama:
Ko te hua whakamutunga ka hiritia i roto i te kiriata konumohe hiato i raro i te argon ultra-parakore (≥99.9999% parakore) hei aukati i te waikura.
IV. Tawhā Tukatuka Matua
| Tukatuka Tukatuka | Te pāmahana (°C). | Te pehanga | Wā/ Tere | Taputapu Matua |
| Ngaruiti Whakarewa | 140–150 | Ambient | 30–45 min | Reactor Ngaruiti |
| Te Horoi Wai Iona | 120 | 2 pae | 1 haora/huringa | Reactor Whakaoho |
| Māturu rāpoi | 300–320 | ≤0.1 Pa | Tonu | Te Ara-poto Molecular Distiller |
| Te Whakamana Rohe | 115–120 | Ambient | 1–3 mm/h | Whakapae Rohe Parapara |
| PTFE Ultrafiltration | 160–180 | ≤0.2 MPa | 1–2 m³/h rere | Tātari Pāmahana-Tinui |
| Te Atomization Nitrogen | 160–180 | 0.8–1.2 MPa | 0.5–1 mm nga kirikiri | Pourewa ngota |
V. Mana Kounga me te Whakamatau
- ;Aroturuki Te Taatari Parakore:
- ;GD-MS (Glow Discharge Mass Spectrometry): Ka kitea nga konganuku i te ≤0.01 ppb.
- ;Kaitirotiro TOC: Ine waro waro ≤0.001 ppm .
- ;Mana Rahi Matūriki:
Ko te rereketanga taiaho (Mastersizer 3000) ka whakarite i te D50 ine ≤±0.05 mm. - ;Te Maama o te Mata:
XPS (X-ray Photoelectron Spectroscopy) e whakau ana i te matotoru waikura mata ≤1 nm .
VI. Haumaru me te Hoahoa Taiao
- ;Aukati Pahū:
Ko nga kaitirotiro mura ahi infrared me nga punaha waipuke hauota ka pupuri i nga taumata hāora <3% - ;Mana Tukunga:
- ;Nga hau waikawa : E rua-waahanga NaOH scrubbing (20% + 10%) tango ≥99.9% H₂S/SO₂.
- ;Nga VOC : Ko te rotor Zeolite + RTO (850°C) ka whakaheke i te hauwai waro-kore ki te ≤10 mg/m³ .
- ;Parapara Hangarua:
Ko te whakaheke i te pāmahana teitei (1200 ° C) ka whakaora i nga konganuku; te toenga whanariki <0.1% .
VII. Hangarau-Ohanga
- ;Te Whakamahi Pungao : 800–1200 kWh hiko me te 2–3 tone mamaoa mo ia tana o te 6N whanariki.
- ;Tukunga : Te whakaora whanariki ≥85%, reeti toenga <1.5%.
- ;Utu : Te utu hanga ~120,000–180,000 CNY/ton; utu hokohoko 250,000–350,000 CNY/ton (koeke semiconductor) .
Ko tenei tukanga e whakaputa ana i te whanariki 6N mo nga photoresists semiconductor, nga taputapu whakauru III-V, me etahi atu tono matatau. Ko te aro turuki i nga wa-tuturu (hei tauira, te tātaritanga huanga o te LIBS) me te karaehe ISO Class 1 ka whakarite kia rite te kounga.
Kupuwaewae
- Tohutoro 2: Nga Paerewa Puring Whanariki Ahumahi
- Tohutoro 3: Nga Tikanga Whiriwhiringa Ake i roto i te Hangarau Matū
- Tohutoro 6: Pukapuka Tukatuka Rawa Maama-Teitei
- Tohutoro 8: Nga Kawa Hanga Matū-Koeke Semiconductor
- Tohutoro 5: Arotautanga Whakamakuku Maama
Te wa tuku: Apr-02-2025